A resonant micromachined magnetic field sensor

IEEE Sensors Journal

Volumn 7, Issue 9, 2007, Pages 1326-1334

  Bahreyni, Behraad ^a,b   Shafai, Cyrus ^a,c  

^a IEEE   (United Kingdom)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^c UNIVERSITY OF MANITOBA   (Canada)

Author keywords

Magnetic field sensor; Microelectromechanical systems (MEMS); Microsensor; Noise; Oscillator; Resonator

Indexed keywords

CURRENT SENSORS; ELECTROSTATIC RESONATORS; MAGNETIC FIELD SENSORS;

CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; LORENTZ FORCE; MACHINE DESIGN; MAGNETIC FIELD EFFECTS; MEMS; MICROMACHINING; NATURAL FREQUENCIES; OSCILLATORS (ELECTRONIC); RESONATORS; SPURIOUS SIGNAL NOISE;

MICROSENSORS;

EID: 34547462127     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2007.902945     Document Type: Article

References (34)

1. R. P. Cowburn and A. M. Moulin, "High sensitivity measurement of magnetic fields using microcantilevers," Appl. Phys. Lett., vol. 71, no. 15, pp. 2202-2204, Oct. 1997.
2. M. Willemin, C. Rössel, J. Brugger, M. H. Despont, H. Rothuizen, P. Vettiger, J. Hofer, and H. Keller, "Piezoresistive cantilever designed foitorque magnetometty," J. Appl. Phys., vol. 83, no. 3, pp. 1163-1170, Feb. 1998.
3. L. M. Miller, J. A. Podosek, E. Kruglick, T. W. Kenny, J. A. Kovacích, and W. J. Kaiser, "A μ-magnetometer based on electron tunneling," in Proc. 9th IEEE Micro Electro Mech. Syst. Conf., San Diego, CA, Feb. 1996, pp. 467-472.
4. D. DiLella, L. J. Whitman, R. J. Colton, T. W. Kenny, W. J. Kaiser, E. C Vote, J. A. Podosek, and L. M. Miller, "A micromachined magneticfield sensor based on an electron tunneling displacement transducer," Sens. Actuators A: Physical, vol. 86, no. 1-2, pp. 8-20, Oct. 2000.
5. H. Emmerich and M. Schofthaler, "Magnetic field measurements with a novel surface micromachined magnetic-field sensor," IEEE Trans. Electron Devices, vol. 47, no. 5, pp. 927-977, May 2000.
6. L. Latorre, V. Beroulle, and P. Nouet, "Design of CMOS MEMS based on mechanical resonators using a RF simulation approach," IEEE Dans. Comput.-Aided Design of Integrated Circuits Syst., vol. 23, no. 6, pp. 962-967, Jun. 2004.
7. S. Dong, J.-F. Li, and D. Viehland, "Vortex magnetic field sensor based on ring-type magnetoelectric laminate," Appl. Phys. Lett., vol. 85, no. 12, pp. 2307-2309, Sep. 2004.
8. Y. Fetisov, A. Bush, K. Kamentsev, A. Ostashchenko, and G. Srinivasan, "Ferrite-piezoelectric multilayers for magnetic field sensors," IEEE Sensors J., vol. 6, no. 4, pp. 935-938, Aug. 2006.
9. Z. Kádár, A. Bossche, J. R. Mollinger, and P. M. Sarro, "Magnetic-field measurements using an integrated resonant magnetic-field sensor," Sens. Actuators A: Physical, vol. 70, no. 3, pp. 225-232, Oct. 1998.
10. B. Eyre, K. S. J. Pister, and W. Kaiser, "Resonant mechanical magnetic sensor in standard CMOS," IEEE Electron Device Lett., vol. 19, no. 12, pp. 496-498, Dec. 1998.
11. A. B. Temnykh and R. V. E. Lovelace, "Electro-mechanical resonant magnetic field sensor," J. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, vol. 484, no. 1-3, pp. 95-101, May 2002.
12. T. C. Leichle, M. V. Arx, S. Reiman, I. Zana, W. Ye, and M. G. Allen, "A low-power resonant micromachined compass," J. Micromech. Microeng., vol. 14, no. 4, pp. 462-470, Apr. 2004.
13. R. Sunier, T. Vancura, Y. Li, K.-U. Kirstein, H. Baltes, and O. Brand, "Resonant magnetic field sensor with frequency output," IEEE J. Microelectromech. Syst., vol. 15, no. 5, pp. 1098-1107, Oct. 2006.
14. B. Bahreyni and C. Shafai, "A micromachined magnetometer with frequency modulation at the output," in Proc. 4th IEEE Conf. Sensors, Irvine, CA, Nov. 2005.
15. M. Elwenspoek and R. Wiegerink, Mechanical Microsensors. Berlin, Germany: Springer-Verlag, 2001.
16. B. Bahreyni, "Design, modeling, simulation, and testing of resonant micromachined magnetic field sensors," Ph.D. dissertation, Dept. Elect. Comput. Eng., Univ. Manitoba, Winnipeg, MB, Canada, 2006.
17. S. Dunkerley, "On the whirling and vibrations of shafts," Philosophical Dans. Royal Soc. London, vol. 185, pp. 279-360, 1894.
18. W. T. Thomson, Theory of Vibration With Applications, 2nd ed. Englewood Cliffs, NJ: Prentice-Hall, 1981.
19. I. Mirolyubov, S. Engalychev, N. Sergievsky, F. Almametov, N. Kuritsyn, K. Smirnov-Vasilyev, and L. Yashina, An aid to solving problems in strength of materials. Moscow, Russia: Mir Publishers, 1983, translated from Russian by Yuri Ermolyev.
20. F. Incropera and D. DeWitt, Fundamentals of heat and mass transfer, 2nd ed. New York: Wiley, 1985.
21. Y. A. Burenkov and S. P. Nikanorov, "Temperature dependence of elastic constants of silicon," J. Soviet Phys. Solid State, vol. 16, pp. 963-964, 1974.
22. R. Hull, Ed., Properties of Crystalline Silicon. London, U.K.: Institution of Electrical Engineers, 1999.
23. MicraGEM: Standardized MEMS Manufacturing Process Micralyne Inc., 19.1.1 94 Street. Edmonton, AB, Canada, T6N 1E6, Feb. 2006.
24. ANSYS Version 8.1. ANSYS Inc., Canonsburg, PA, 2004. [Online]. Available: http://www.ansys.com.
25. C. T.-C. Nguyen and R. T. Howe, "An integrated CMOS micromechanical resonator high-Q oscillator," IEEE J. Solid-State Circuits, vol. 34, no. 4, pp. 440-455, Apr. 1999.
26. W. C. Tang, "Electrostatic comb drive for resonant sensor and actuator applications," Ph.D. dissertation, Dept. Elect. Eng. Comput. Sci., Univ. California, Berkeley, CA, 1992.
27. M. N. Horenstein and P. R. Stone, "A micro-aperture electrostatic field mill based on MEMS technology," J. Electrostatics, vol. 51-52, pp. 515-521, May 2001.
28. S. R. Trout, "Use of Helmholtz coils for magnetic measurements," IEEE Trans. Magn., vol. 24, no. 4, pp. 2108-2111, Jul. 1988.
29. C. T.-C. Nguyen, "Micromechanical resonators for oscillators and filters," in Proc. IEEE Ultrasonics Symp., Ann Arbor, MI, Nov. 1995, vol. 1, pp. 489-499.
30. B. P. Otis and J. M. Rabaey, "A 300 μW 1.9 GHz CMOS oscillator utilizing micromachined resonators," IEEE J. Solid-State Circuits, vol. 38, pp. 1271-1274, Jul. 2003.
31. D. W. Allan, "Time and frequency (time-domain) characterization, estimation, and prediction of precision clocks and oscillators," IEEE Trans. Ultrason., Ferroelect., Freq. Com., vol. 34, no. 6, pp. 647-654, Nov. 1987.
32. W. F. Egan, "An efficient algorithm to compute Allan variance from spectral density," IEEE Trans. Instrum. Measure., vol. 37, no. 2, pp. 240-244, June 1988.
33. T. B. Gabrielson, "Mechanical-thermal noise in micromachined acoustic and vibration sensors," IEEE Trans. Electron Devices, vol. 40, no. 5, pp. 903-909, May 1993.
34. T. Hofler and S. L. Garrett, "Thermal noise in a fiber optic sensor," J. Acoust. Soc. Amer., vol. 84, no. 2, pp. 471-475, Aug. 1988.