Electrostatic charge and field sensors based on micromechanical resonators

Journal of Microelectromechanical Systems

Volumn 12, Issue 5, 2003, Pages 577-589

  Riehl, Patrick S ^a   Scott, Karen L ^b   Muller, Richard S ^b   Howe, Roger T ^b   Yasaitis, John A ^a  

^a ANALOG DEVICES INC   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Electrometer; Electrostatic fieldmeter (EFM); Electrostatic voltmeter; Variable capacitor

Indexed keywords

ELECTRIC FIELDS; ELECTROMETERS; MICROSENSORS; RESONATORS;

ELECTROSTATIC CHARGE; ELECTROSTATIC FIELDMETER; MICROELECTROMECHANICAL RESONATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0242636517     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.818066     Document Type: Article

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