A resonant accelerometer with two-stage microleverage mechanisms fabricated by SOI-MEMS technology

IEEE Sensors Journal

Volumn 5, Issue 6, 2005, Pages 1214-1222

  Su, Susan X P ^a,d   Yang, Henry S ^b,e   Agogino, Alice M ^c,e,f,g,h  

^a International Technological University   (United States)

^b M/S 1158   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

^d Semiconductor System Integration Corporation   (United States)

^e International Technological University ^*  (United States)

^f Mechanical Engineering   (United States)

^g UNIVERSITY OF CALIFORNIA   (United States)

^h NEEDS   (United States)

Author keywords

Double ended tuning fork (DETF) resonator; Microleverage mechanism; Resonant accelerometer; Silicon on insulator microelectromechanical systems (SOI MEMS)

Indexed keywords

DOUBLE-ENDED-TUNING-FORK (DETF) RESONATORS; MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROLEVERAGE MECHANISMS; RESONANT ACCELEROMETERS;

FABRICATION; MICROELECTROMECHANICAL DEVICES; RESONANCE; SILICON ON INSULATOR TECHNOLOGY; TUNING;

ACCELEROMETERS;

EID: 29144503104     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2005.857876     Document Type: Article

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