Multi-domain simulation using VHDL-AMS for distributed MEMS in functional environment: Case of a 2D air-jet micromanipulator

Sensors and Actuators, A: Physical

Volumn 148, Issue 1, 2008, Pages 224-238

  Chapuis, Y A ^a,b   Zhou, L ^a   Fujita, H ^b,c   Herve Y ^a,d  

^a Faculté de Médecine   (France)

^b UNIVERSITY OF TOKYO   (Japan)

^c INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^d Systems' Virtual Prototyping SAS   (France)

Author keywords

2D air flow micromanipulation; Distributed MEMS; Multi domain simulation; Pneumatic microactuator; Smart surface; VHDL AMS

Indexed keywords

AIR; COST EFFECTIVENESS; FIGHTER AIRCRAFT; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMANIPULATORS; PNEUMATICS;

AIR FLOW; CIRCUIT LEVEL DESIGN; COST-EFFECTIVE SOLUTIONS; DESIGN AND SIMULATION; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MULTI-DOMAIN SIMULATION; SMART SURFACES; VHDL-AMS;

MEMS;

EID: 55349116720     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.07.025     Document Type: Article

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