Characterization of a novel hybrid silicon three-axial force sensor

Sensors and Actuators, A: Physical

Volumn 123-124, Issue , 2005, Pages 249-257

  Valdastri, P ^a   Roccella, S ^a   Beccai, L ^a   Cattin, E ^a   Menciassi, A ^a   Carrozza, M C ^a   Dario, P ^a  

^a SCUOLA SUPERIORE SANT ANNA   (Italy)

Author keywords

Characterization; Hybrid; MEMS based; Three axial force sensor

Indexed keywords

BIOMECHANICS; CHARACTERIZATION; FORCE MEASUREMENT; HYSTERESIS; MATRIX ALGEBRA; SENSITIVITY ANALYSIS; SILICON;

BIOMECHANICAL MEASUREMENT; FORCE ENSORS; HYBRID SILICON; LOAD CELLS;

SENSORS;

EID: 24944475936     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.01.006     Document Type: Conference Paper

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