Design, fabrication, and control of MEMS-based actuator arrays for air-flow distributed micromanipulation

Journal of Microelectromechanical Systems

Volumn 15, Issue 4, 2006, Pages 912-926

  Fukuta, Yamato ^a,b,c   Chapuis, Yves Andre ^a   Mita, Yoshio ^d   Fujita, Hiroyuki ^b  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b JR East Consultants Co Ltd   (Japan)

^c Research and Development Center   (Japan)

^d UNIVERSITY OF TOKYO   (Japan)

Author keywords

Distributed control; Fluid flow control; Microelectromechanical devices; Pneumatic microactuators

Indexed keywords

DISTRIBUTED PARAMETER CONTROL SYSTEMS; ELECTROSTATIC ACTUATORS; FLOW CONTROL; MICROACTUATORS; MICROMANIPULATORS; MOTION CONTROL; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON ON INSULATOR TECHNOLOGY;

EMULATION APPROACH; HYDROFLUORIC ACID VAPOR RELEASE; PNEUMATIC MICROACTUATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 33747405542     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.879378     Document Type: Article

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