Instabilities during the growth of dust successive generations in silane-based plasmas

Physics of Plasmas

Volumn 15, Issue 10, 2008, Pages

  Cavarroc, Marjorie ^a   Mikikian, Maxime ^a   Tessier, Yves ^a   Boufendi, Laïfa ^a  

^a UNIVERSITÉ D'ORLÉANS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DUST; PLASMA DIAGNOSTICS; PLASMAS; SILANES;

COMPLEX PLASMAS; DUST CLOUDS; ELECTRICAL ANALYSES; HIGH SPEEDS; OPTICAL-; UNSTABLE BEHAVIORS; VIDEO IMAGING;

PLASMA STABILITY;

EID: 55149113489     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2998835     Document Type: Article

References (47)

1. R. Roth, K. Spears, G. Stein, and G. Wong, Appl. Phys. Lett. 46, 253 (1985).
2. G. S. Selwyn, J. Singh, and R. S. Bennett, J. Vac. Sci. Technol. A 7, 2758 (1989).
3. J. Winter, Plasma Phys. Controlled Fusion 40, 1201 (1998).
4. C. Arnas, C. Dominique, P. Roubin, C. Martin, C. Brosset, and B. Ṕgourí, J. Nucl. Mater. 353, 80 (2006).
5. M. Cavarroc, M. Mikikian, G. Perrier, and L. Boufendi, Appl. Phys. Lett. 89, 013107 (2006).
6. P. Roca i Cabarrocas, N. Chaabane, A. Kharchenko, and S. Tchakarov, Plasma Phys. Controlled Fusion 46, B235 (2004).
7. S. Tiwari, F. Rana, H. Hanafi, A. Hartstein, and E. F. Crabb́, Appl. Phys. Lett. 68, 1377 (1996).
8. C. Szopa, G. Cernogora, L. Boufendi, J. J. Correia, and P. Coll, Planet. Space Sci. 54, 394 (2006).
9. G. Morfill, H. Thomas, U. Konopka, H. Rothermel, M. Zuzic, A. Ivlev, and J. Goree, Phys. Rev. Lett. 83, 1598 (1999).
10. G. S. Selwyn, J. S. McKillop, K. L. Haller, and J. J. Wu, J. Vac. Sci. Technol. A 8, 1726 (1990).
11. B. Ganguly, A. Garscadden, J. Williams, and P. Haaland, J. Vac. Sci. Technol. A 11, 1119 (1993).
12. G. Praburam and J. Goree, Phys. Plasmas 3, 1212 (1996).
13. M. Mikikian, L. Boufendi, A. Bouchoule, H. M. Thomas, G. E. Morfill, A. P. Nefedov, V. E. Fortov, and the PKE-Nefedov Team, New J. Phys. 5, 19 (2003).
14. Y. Watanabe, M. Shiratani, Y. Kubo, I. Ogawa, and S. Ogi, Appl. Phys. Lett. 53, 1263 (1988).
15. A. Bouchoule, A. Plain, L. Boufendi, J. P. Blondeau, and C. Laure, J. Appl. Phys. 70, 1991 (1991).
16. A. Howling, C. Hollenstein, and P.-J. Paris, Appl. Phys. Lett. 59, 1409 (1991).
17. M. Cavarroc, M. C. Jouanny, K. Radouane, M. Mikikian, and L. Boufendi, J. Appl. Phys. 99, 064301 (2006).
18. C. Deschenaux, A. Affolter, D. Magni, C. Hollenstein, and P. Fayet, J. Phys. D 32, 1876 (1999).
19. S. Hong, J. Berndt, and J. Winter, Surf. Coat. Technol. 174-175, 754 (2003).
20. J. Pereira, V. Massereau-Guilbaud, I. Ǵraud-Grenier, and A. Plain, J. Appl. Phys. 103, 033301 (2008).
21. K. de Bleecker, A. Bogaerts, and W. Goedheer, Phys. Rev. E 73, 026405 (2006).
22. J. Berndt, E. Kovacevic, V. Selenin, I. Stefanovic, and J. Winter, Plasma Sources Sci. Technol. 15, 18 (2006).
23. C. Böhm and J. Perrin, J. Phys. D 24, 865 (1991).
24. E. Stoffels, W. Stoffels, G. Kroesen, and F. de Hoog, J. Vac. Sci. Technol. A 14, 556 (1996).
25. B. Walch, M. Horanyi, and S. Robertson, IEEE Trans. Plasma Sci. 22, 97 (1994).
26. A. Melzer, T. Trottenberg, and A. Piel, Phys. Lett. A 191, 301 (1994).
27. C. Arnas, M. Mikikian, and F. Doveil, Phys. Rev. E 60, 7420 (1999).
28. L. Coudel, M. Mikikian, L. Boufendi, and A. A. Samarian, Phys. Rev. E 74, 026403 (2006).
29. M. Mikikian, M. Cavarroc, L. Coudel, and L. Boufendi, Phys. Plasmas 13, 092103 (2006).
30. J. Dorier, C. Hollenstein, and A. Howling, J. Vac. Sci. Technol. A 13, 918 (1995).
31. J. Goree, G. E. Morfill, V. N. Tsytovich, and S. V. Vladimirov, Phys. Rev. E 59, 7055 (1999).
32. M. R. Akdim and W. J. Goedheer, Phys. Rev. E 65, 015401 (2001).
33. K. Avinash, Phys. Plasmas 8, 2601 (2001).
34. J. Schauer, S. Hong, and J. Winter, Plasma Sources Sci. Technol. 13, 636 (2004).
35. M. Kretschmer, S. A. Khrapak, S. K. Zhdanov, H. M. Thomas, G. E. Morfill, V. E. Fortov, A. M. Lipaev, V. I. Molotkov, A. I. Ivanov, and M. V. Turin, Phys. Rev. E 71, 056401 (2005).
36. S. V. Vladimirov, V. N. Tsytovich, and G. E. Morfill, Phys. Plasmas 12, 052117 (2005).
37. M. Cavarroc, M. Mikikian, Y. Tessier, and L. Boufendi, Phys. Rev. Lett. 100, 045001 (2008).
38. M. Mikikian and L. Boufendi, Phys. Plasmas 11, 3733 (2004).
39. M. Mikikian, L. Coudel, M. Cavarroc, Y. Tessier, and L. Boufendi, New J. Phys. 9, 268 (2007).
40. M. Mikikian, M. Cavarroc, L. Coudel, Y. Tessier, and L. Boufendi, Phys. Rev. Lett. 100, 225005 (2008).
41. L. Boufendi, A. Plain, J. P. Blondeau, A. Bouchoule, C. Laure, and M. Toogood, Appl. Phys. Lett. 60, 169 (1992).
42. L. Boufendi, J. Gaudin, S. Huet, G. Viera, and M. Dudemaine, Appl. Phys. Lett. 79, 4301 (2001).
43. A. A. Fridman, L. Boufendi, T. Hbid, B. V. Potapkin, and A. Bouchoule, J. Appl. Phys. 79, 1303 (1996).
44. M. Shiratani, T. Fukuzawa, and Y. Watanabe, Jpn. J. Appl. Phys., Part 1 38, 4542 (1999).
45. A. Melzer, A. Homann, A. Piel, V. A. Schweigert, and I. V. Schweigert, AIP Conf. Proc. 446, 168 (1998).
46. L. Boufendi, J. Hermann, A. Bouchoule, B. Dubreuil, E. Stoffels, W. W. Stoffels, and M. L. deGiorgi, J. Appl. Phys. 76, 148 (1994).
47. M. Mikikian, L. Boufendi, and A. Bouchoule, Proceedings of the 30th EPS Conference on Plasma Physics and Controlled Fusion, St. Petersburg, 2003, edited by, R. Koch, and, S. Lebedev, (European Physical Society, Petit-Lancy, 2003), Vol. 27A, p. O-3.1B.