In-situ study of dust particle formation in Ar/CH4 and Ar/C2H2 mixtures

Surface and Coatings Technology

Volumn 174-175, Issue , 2003, Pages 754-757

  Hong, S ^a   Berndt, J ^a   Winter, J ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

Acetylene; Argon; Dispersion coatings; Methane; Nucleation

Indexed keywords

ARGON; EMISSION SPECTROSCOPY; IN SITU PROCESSING; LASER APPLICATIONS; LIGHT ABSORPTION; LIGHT SCATTERING; MASS SPECTROMETRY; METHANE; MIXTURES; PLASMA APPLICATIONS; SPECTRUM ANALYSIS;

PLASMA EMISSIONS;

DUST;

COATING; INDUSTRIAL APPLICATION; PLASMA; SURFACE PROPERTY;

EID: 18144438351     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00424-9     Document Type: Article

References (8)

1. Langmuir I. Found G. Dittmer A.F. Sci. NewYork 60 1924 392
2. Tanenbaum D.M. Laracuente A.L. Gallagher A. Appl. Phys. Lett. 68 1996 1705
3. Buss R. Babu S. J. Vac. Sci. Technol. A 14 1996 577
4. Hahn H. Averback R. J. Appl. Phys. 67 1990 1113
5. S. Hong, J. Berndt, J. Winter, The 3rd International Conference on the Physics of Dusty Plasmas. (ICPDP-2002), Durban, South Africa, 20-24 May 2002
6. I. Stefanović, E. Kovačević, S. Hong, J. Berndt, J. Winter, 16th ESCAMPIG and 5th ICRP Joint Conference, Grenoble, France, 14-18 July 2002
7. S. Hong, J. Berndt, E. Kovačević, I. Stefanović I., J. Winter, 29th EPS Conference on Plasma Physics and Controlled Fusion, Montreux, Switzerland, 17-21 June 2002
8. Boufendi L. Gaudin J. Huet S. Viera G. Dudemaine M. App. Phys. Lett. 79 2001 4301