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Japanese Journal of Applied Physics

Volumn 47, Issue 5 PART 1, 2008, Pages 3412-3417

Development of developer-soluble gap fill materials for planarization in via-first dual damascene process

(4) Takei, Satoshi a Sakaida, Yasushi a Ishii, Kazuhisa a Shinjo, Tetsuya a

a NISSAN CHEMICAL INDUSTRIES LTD (Japan)

Author keywords

Dual damascene; Etch rate; Gap fill materials; Lithography; Planarization

Indexed keywords

ABS RESINS; ANTIREFLECTION COATINGS; CLEANING; CONCENTRATION (PROCESS); DISSOLUTION; GALLIUM ALLOYS; LITHOGRAPHY; METAL RECOVERY; PHENOLS; PHOTORESISTS; RATE CONSTANTS; THROUGHPUT;

ADVANCED LITHOGRAPHIES; ALKALINE DEVELOPERS; BOTTOM ANTIREFLECTIVE COATINGS; DISSOLUTION RATES; DRY PLASMAS; DUAL DAMASCENE; DUAL DAMASCENE PROCESSES; ETCH RATE; ETCH RATES; GAP FILL MATERIALS; HIGH THROUGHPUTS; HYDROXYSTYRENE; OPTIMIZING; PATTERNING; PHENOL GROUPS; PLANARIZATION; PLANARIZING; POLYMER STRUCTURES; PREBAKE TEMPERATURES; PROCESS WINDOWS; RESIDUAL GAPS; SACRIFICIAL MATERIALS; TETRAMETHYLAMMONIUM HYDROXIDES;

COATED MATERIALS;

EID: 55049095501 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.47.3412 Document Type: Article

Times cited : (2)

References (12)

1
- 35948937660
- S. Takei, T. Shinjo, Y. Sakaida, and K. Hashimoto: Jpn. J. Appl. Phys. 46 (2007) 7273.
- (2007) Jpn. J. Appl. Phys , vol.46 , pp. 7273
- Takei, S.¹ Shinjo, T.² Sakaida, Y.³ Hashimoto, K.⁴

2
- 34548734820
- S. Takei, Y. Sakaida, and T. Shinjo: Jpn. J. Appl. Phys. 46 (2007) 5755.
- (2007) Jpn. J. Appl. Phys , vol.46 , pp. 5755
- Takei, S.¹ Sakaida, Y.² Shinjo, T.³

3
- 34547849343
- S. Takei, T. Shinjo, and Y. Sakaida: Jpn. J. Appl. Phys. 46 (2007) 949.
- (2007) Jpn. J. Appl. Phys , vol.46 , pp. 949
- Takei, S.¹ Shinjo, T.² Sakaida, Y.³

4
- 35148899665
- T. Shinjo, S. Takei, Y. Horiguchi, and Y. Nakajima: Proc. SPIE 6519 (2007) 651930.
- (2007) Proc. SPIE , vol.6519 , pp. 651930
- Shinjo, T.¹ Takei, S.² Horiguchi, Y.³ Nakajima, Y.⁴

5
- 35148825594
- R. Huang, D. Sullivan, A. Qin, and S. Brown: Proc. SPIE 6519 (2007) 65192T.
- (2007) Proc. SPIE , vol.6519
- Huang, R.¹ Sullivan, D.² Qin, A.³ Brown, S.⁴

6
- 33745627516
- S. Takei, T. Shinjo, Y. Sakaida, Y. Horiguchi, and Y. Nakajima: Proc. SPIE 6153 (2006) 61532Q.
- (2006) Proc. SPIE , vol.6153
- Takei, S.¹ Shinjo, T.² Sakaida, Y.³ Horiguchi, Y.⁴ Nakajima, Y.⁵

7
- 33745633392
- A. Qin, D. M. Sullivan, and R. Huang: Proc. SPIE 6153 (2006) 61532T.
- (2006) Proc. SPIE , vol.6153
- Qin, A.¹ Sullivan, D.M.² Huang, R.³

8
- 24644519815
- T. Shinjo, S. Takei, Y. Sakaida, A. Qin, and Y. Nakajima: Proc. SPIE 5753 (2005) 636.
- (2005) Proc. SPIE , vol.5753 , pp. 636
- Shinjo, T.¹ Takei, S.² Sakaida, Y.³ Qin, A.⁴ Nakajima, Y.⁵

9
- 3843073043
- M. Bhave, K. Edwards, C. A. Washburn, S. Takei, Y. Sakaida, and Y. Nakajima: Proc. SPIE 5376 (2004) 640.
- (2004) Proc. SPIE , vol.5376 , pp. 640
- Bhave, M.¹ Edwards, K.² Washburn, C.A.³ Takei, S.⁴ Sakaida, Y.⁵ Nakajima, Y.⁶

10
- 0038352554
- Y. Wang, X. Wu, G. Xu, J. E. Lamb III, J. Sullivan, J. B. Claypool, J. Backus, S. Trautman, X. Shao, S. Takei, Y. Sone, K. Mizusawa, and H. Fukuro: Proc. SPIE 4345 (2001) 838.
- (2001) Proc. SPIE , vol.4345 , pp. 838
- Wang, Y.¹ Wu, X.² Xu, G.³ Lamb III, J.E.⁴ Sullivan, J.⁵ Claypool, J.B.⁶ Backus, J.⁷ Trautman, S.⁸ Shao, X.⁹ Takei, S.¹⁰ Sone, Y.¹¹ Mizusawa, K.¹² Fukuro, H.¹³

11
- 0038380867
- M. Mukherjee-Roy, V. Bliznetsov, and G. Samudra: Jpn. J. Appl. Phys. 42 (2003) 2649.
- (2003) Jpn. J. Appl. Phys , vol.42 , pp. 2649
- Mukherjee-Roy, M.¹ Bliznetsov, V.² Samudra, G.³

12
- 33745586326
- K. S. Patel, V. Pham, W. Li, M. Khojasteh, and P. Rao Varanasi: Proc. SPIE 6153 (2006) 61530Q.
- (2006) Proc. SPIE , vol.6153
- Patel, K.S.¹ Pham, V.² Li, W.³ Khojasteh, M.⁴ Rao Varanasi, P.⁵

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