Fabricating microbolometer array on unplanar readout integrated circuit

International Journal of Infrared and Millimeter Waves

Volumn 26, Issue 5, 2005, Pages 751-762

  Wang, Hongchen ^a   Yi, Xinjian ^a   Lai, Jianjun ^a   Li, Yi ^a,b  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Infrared detection; Microbolometer array; Readout integrated circuit; Uncooled; Vanadium oxide thin film

Indexed keywords

CMOS INTEGRATED CIRCUITS; CRYOGENICS; INFRARED RADIATION; MICROMACHINING; NICKEL PLATING; READOUT SYSTEMS; REFRIGERATION; THIN FILMS; VANADIUM COMPOUNDS;

INFRARED DETECTION; MICROBOLOMETER ARRAY; READOUT INTEGRATED CIRCUIT; UNCOOLED; VANADIUM OXIDE THIN FILM;

BOLOMETERS;

EID: 18644386557     PISSN: 01959271     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10762-005-4983-8     Document Type: Article

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