Miniaturized FTIR-spectrometer based on optical MEMS translatory actuator

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6466, Issue , 2007, Pages

  Sandner, Thilo ^a   Kenda, Andreas ^b   Drabe, Christian ^a   Schenk, Harald ^a   Scherf, Werner ^b  

^a CTR CARINTHIAN TECH RESEARCH AG   (Austria)

^b FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

Author keywords

FTIR spectrometer; Infrared spectrometry; MOEMS; Translatory micro mirror; Vacuum packaging

Indexed keywords

ACTUATORS; CMOS INTEGRATED CIRCUITS; DIGITAL SIGNAL PROCESSORS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; OPTIMIZATION; SILICON ON INSULATOR TECHNOLOGY; SPECTRAL RESOLUTION;

INFRARED SPECTROMETRY; TRANSLATORY MICRO MIRROR; VACUUM PACKAGING;

MEMS;

EID: 34247388925     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.697898     Document Type: Conference Paper

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