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Volumn , Issue , 2006, Pages 44-45
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Vertical resonant comb actuators for fourier transform spectroscopy
a a
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KOÇ UNIVERSITY
(Turkey)
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Author keywords
[No Author keywords available]
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Indexed keywords
DIFFRACTION GRATINGS;
FOURIER TRANSFORMS;
PRESSURE EFFECTS;
APERTURE DEVICES;
RESONANT MODE;
ACTUATORS;
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EID: 41549122054
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/omems.2006.1708256 Document Type: Conference Paper |
Times cited : (4)
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References (5)
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