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Volumn , Issue , 2006, Pages 44-45

Vertical resonant comb actuators for fourier transform spectroscopy

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; FOURIER TRANSFORMS; PRESSURE EFFECTS;

EID: 41549122054     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/omems.2006.1708256     Document Type: Conference Paper
Times cited : (4)

References (5)
  • 3
    • 33746663604 scopus 로고    scopus 로고
    • MEMS based visible-NIR Fourier transform microspectrometer
    • C. Ataman, S. O. Isikman, H. Urey, A Wolter, " MEMS based visible-NIR Fourier transform microspectrometer," Proc. SPIE vol. 6186, 61860C, 2006.
    • (2006) Proc. SPIE , vol.6186
    • Ataman, C.1    Isikman, S.O.2    Urey, H.3    Wolter, A.4
  • 4
    • 29144491918 scopus 로고    scopus 로고
    • Modeling and characterization of comb actuated resonant microscanners
    • C. Ataman, H. Urey, " Modeling and characterization of comb actuated resonant microscanners," Journal of Micromechanics and Microengineering, Vol. 16 p. 9-16, 2006.
    • (2006) Journal of Micromechanics and Microengineering , vol.16 , pp. 9-16
    • Ataman, C.1    Urey, H.2
  • 5
    • 33746727716 scopus 로고    scopus 로고
    • Application of a micromachined translatory actuator to an optical FTIR spectrometer
    • A. Kenda, C. Drabe, H. Schenk, A. Frank, M. Lenzhofer, W. Scherf, "Application of a micromachined translatory actuator to an optical FTIR spectrometer," Proc. SPIE, vol. 6186, 618609, 2006.
    • (2006) Proc. SPIE , vol.6186 , pp. 618609
    • Kenda, A.1    Drabe, C.2    Schenk, H.3    Frank, A.4    Lenzhofer, M.5    Scherf, W.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.