Standing-wave transform spectrometer based on integrated MEMS mirror and thin-film photodetector

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 8, Issue 1, 2002, Pages 98-105

  Kung, Helen L ^a,b   Bhalotra, Sameer R ^a,b   Mansell, Justin D ^a,b   Miller, David A B ^a,b   Harris Jr , James S ^a,b  

^a IEEE   (United States)

^b STANFORD UNIVERSITY   (United States)

Author keywords

Fourier transform spectrometers; Micro electromechanical devices; Microsensors; Spectral analysis; Spectroscopy; Wavelength measurement

Indexed keywords

MIRROR STABILITY;

ELECTROSTATICS; FOURIER TRANSFORMS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; MIRRORS; PHOTODETECTORS; SPECTROSCOPIC ANALYSIS; SPECTRUM ANALYSIS; THIN FILMS;

SPECTROMETERS;

EID: 0036243660     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/2944.991404     Document Type: Article

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