Fabrication of microstructures in photoetchable glass ceramics using excimer and femtosecond lasers

Journal of Microlithography, Microfabrication and Microsystems

Volumn 3, Issue 3, 2004, Pages 478-485

  Kim, Joohan ^a   Berberoglu, Halil ^a   Xu, Xianfan ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

3 d machining; Excimer laser; Femtosecond laser; Micromachining; Photoetchable glass ceramics

Indexed keywords

CHEMICAL ETCHING; CHEMICAL STABILITY; FEMTOSECOND LASERS; PHOTOETCHABLE GLASS CERAMICS;

ELASTIC MODULI; ETCHING; EXCIMER LASERS; FIELD EMISSION DISPLAYS; HEAT TREATMENT; LASER BEAMS; LIGHT SOURCES; MICROSTRUCTURE;

GLASS CERAMICS;

EID: 5444265256     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1759330     Document Type: Conference Paper

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