GEM-type detectors using LIGA and etchable glass technologies

IEEE Transactions on Nuclear Science

Volumn 49 II, Issue 3, 2002, Pages 870-874

  Ahn, S K ^a,b   Kim, J G ^a,c   Perez Mendez, V ^a   Chang, S ^a,b   Jackson, K H ^a   Kadyk, J A ^a   Wenzel, W A ^a   Cho, G ^b  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^c Myong Ji University   (South Korea)

Author keywords

Radiation detector

Indexed keywords

COPPER; ELECTRODES; ELECTRON MULTIPLIERS; ETCHING; POLYMETHYL METHACRYLATES; SYNCHROTRON RADIATION; ULTRAVIOLET RADIATION; X RAY LITHOGRAPHY;

COPPER ELECTRODES; DAMASCENE METHOD; GAS ELECTRON MULTIPLIERS; ULTRAVIOLET ETCHABLE GLASS;

RADIATION DETECTORS;

EID: 0036624371     PISSN: 00189499     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNS.2002.1039581     Document Type: Article

References (8)

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