Fabrication of true 3D microstructures in glass/ceramic materials by pulsed UV laser volumetric exposure techniques

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3618, Issue , 1999, Pages 213-220

  Fuqua, Peter ^a   Janson, S W ^a   Hansen, W W ^a   Helvajian, H ^a  

^a AEROSPACE CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; CRYSTAL MICROSTRUCTURE; ETCHING; GLASS; MICROMACHINING; MULTICHIP MODULES; NANOSTRUCTURED MATERIALS; PHOTOSENSITIVITY; THREE DIMENSIONAL; ULTRAVIOLET RADIATION;

DIRECT WRITE EXPOSURE; LASER MICROMACHINING; NANOSATELLITE;

PULSED LASER APPLICATIONS;

EID: 0033359270     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)