Laser fabrication of glass microstructures

Industrial Physicist

Volumn 8, Issue 3, 2002, Pages 18-21

  Hansen, William ^a   Fuqua, Pete ^a   Livingston, Frank ^a   Huang, Adam ^a   Abraham, Meg ^a   Taylor, Dave ^a   Janson, Siegfried ^a   Helvajian, Henry ^a  

^a AEROSPACE CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; EXCIMER LASERS; FABRICATION; FREE ELECTRON LASERS; MICROSTRUCTURE; OPTICAL MICROSCOPY; PHOTOLITHOGRAPHY; SEMICONDUCTOR DOPING; SPECTROSCOPIC ANALYSIS; WSI CIRCUITS;

GLASS MICROSTRUCTURES; LASER FABRICATION;

GLASS MANUFACTURE;

EID: 0036607215     PISSN: 10821848     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (0)