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Volumn 30, Issue 1-4, 1996, Pages 497-504
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Fabrication technologies for microsystems utilizing photoetchable glass
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Author keywords
[No Author keywords available]
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Indexed keywords
ELASTIC MODULI;
ELECTRIC INSULATION;
GLASS;
MICROELECTRONICS;
MICROSTRUCTURE;
OPTIMIZATION;
SEMICONDUCTOR DEVICES;
THERMAL INSULATION;
TRANSPARENCY;
MICROSYSTEMS;
PHOTOETCHABLE GLASS;
PHOTOSTRUCTURING;
MICROELECTRONIC PROCESSING;
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EID: 0029732554
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/0167-9317(95)00295-2 Document Type: Article |
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Times cited : (157)
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References (5)
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