Reliability studies of bent-beam electro-thermal actuators

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 2000, Pages 118-122

  Que, Long ^a   Park, Jae Sung ^a   Li, Mo Huang ^a   Gianchandani, Yogesh B ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; SEMICONDUCTING SILICON;

BENT-BEAM MICROACTUATORS; ELECTRO-THERMAL MICROACTUATORS;

MICROACTUATORS;

EID: 0033733054     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (12)