Study on the influence of nitrogen on titanium nitride in a dc post magnetron sputtering plasma system

Journal of Physics D: Applied Physics

Volumn 41, Issue 19, 2008, Pages

  Borah, Sankar Moni ^a   Bailung, Heremba ^a   Pal, Arup Ratan ^a   Chutia, Joyanti ^a  

^a INSTITUTE OF ADVANCED STUDY IN SCIENCE AND TECHNOLOGY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ATOMIC SPECTROSCOPY; CONCENTRATION (PROCESS); DISCHARGE (FLUID MECHANICS); DISTRIBUTION FUNCTIONS; EMISSION SPECTROSCOPY; GLOW DISCHARGES; INERT GASES; MAGNETRON SPUTTERING; MAGNETRONS; MOLECULAR SPECTROSCOPY; NITRIDES; NITROGEN; OPTICAL EMISSION SPECTROSCOPY; PLASMA DEVICES; PLASMA THEORY; PLASMAS; TITANIUM; TITANIUM COMPOUNDS; TITANIUM NITRIDE; WATER POLLUTION;

CATHODE SHEATH; DIRECT CURRENT (DC) GLOW DISCHARGE; DISCHARGE MODES; ELECTRON ENERGY DISTRIBUTION FUNCTION; MAGNETRON SPUTTERING PLASMAS; NITROGEN CONCENTRATIONS; NITROGEN GASES; OPTICAL EMISSIONS; PLASMA PARAMETERS; PLASMA POTENTIALS; SPACE VARIATION; TEMPERATURE PROFILING; TRANSPORT MECHANISMS;

ELECTRIC DISCHARGES;

EID: 53349153619     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/19/195205     Document Type: Article

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