Statistical models for carbon-nitrogen film growth

Physical Review E - Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics

Volumn 61, Issue 4, 2000, Pages 3417-3425

  Aarao Reis F D A ^a   Franceschini, D F ^a  

^a FLUMINENSE FEDERAL UNIVERSITY   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

AGGLOMERATION; AGGREGATES; AMORPHOUS CARBON; AMORPHOUS FILMS; ATOMS; CARBON FILMS; DEPOSITION; EROSION; EXPERIMENTS; GROWTH KINETICS; HYDROGEN BONDS; ION BOMBARDMENT; METHANE; NITROGEN; NITROGEN PLASMA; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PROBABILITY; SURFACE ROUGHNESS;

AGGREGATION PROCESS; AMMONIA ATMOSPHERE; BULK CONCENTRATION; LATTICE STRUCTURES; NITROGEN ATMOSPHERES; RESTRICTED SOLID-ON-SOLID MODELS; SIMPLE-CUBIC LATTICES; SPATIAL CORRELATIONS;

FILM GROWTH;

EID: 5244374820     PISSN: 1063651X     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevE.61.3417     Document Type: Article

References (37)

1. D. Marton, K.J. Boyd, and J. W. Rabalais, Int. J. Mod. Phys. B 9, 3527 (1995).
2. S.R.P. Silva, J. Robertson, G.A.J. Amaratunga, B. Raferty, L.M. Brown, D.F. Franceschini, and G. Mariotto, J. Appl. Phys. 81, 2626 (1997).
3. D.F. Franceschini, C.A. Achete, and F.L. Freire, Jr., Appl. Phys. Lett. 60, 3229 (1992).
4. S. Mettin, J.H. Kauffman, D.D. Saperstein, J.C. Scott, J. Heyman, and E.E. Haler, J. Mater. Res. 9, 396 (1994).
5. D. Li, S. Lopez, Y.W. Chung, M.S. Wong, and W.D. Sproul, J. Vac. Sci. Technol. 13, 1063(1995).
6. D.F. Franceschini, F.L. Freire, Jr., and S.R.P. Silva, Appl. Phys. Lett. 68, 2645 (1996).
7. X.-M. He, L. Shu, W.-Z. Li, and H.-D. Li, J. Mater. Res. 12, 1595 (1997).
8. V.S. Veerasamy, J. Yuan, G.A.J. Amaratunga, W.I. Milne, K.W.R. Gilkes, M. Weiler, and L.M. Brown, Phys. Rev. B 48, 17 954 (1993).
9. F.L. Freire, Jr. and D.F. Franceschini, Thin Solid Films 293, 236 (1997).
10. A.Y. Liu and M.L. Cohen, Science 245, 841 (1989).
11. R. Priolli, S.I. Zanette, A.O. Caride, D.F. Franceschini, and F.L. Freire, Jr., J. Vac. Sci. Technol. A 14, 2351 (1996).
12. A. Stanishevsky, Mater. Lett. 37, 162 (1998).
13. S.S. Todorov, D. Marton, K.J. Boyd, A.H. Al Bayati, and J.W. Rabalais, J. Vac. Sci. Technol. A 12, 3192 (1994).
14. F.D.A. Aarão Reis and D.F. Franceschini, Appl. Phys. Lett. 74, 209 (1999).
15. L.G. Jacobsohn, F.L. Freire, Jr., D.F. Franceschini, M.M. Lacerda, and G. Mariotto, J. Vac. Sci. Technol. A 17, 545 (1999).
16. W. Jacob, Thin Solid Films 326, 1 (1998).
17. J.M. Kim and J.M. Kosterlitz, Phys. Rev. Lett. 62, 2289 (1989).
18. Y. Kim, D.K. Park, and J.M. Kim, J. Phys. A 27, L533 (1994).
19. K.J. Clay, S.P. Speakman, G.A.J. Amaratunga, and S.R.P. Silva, J. Appl. Phys. 79, 7227 (1996).
20. P. Hammer and W. Gissler, Diamond Relat. Mater. 5, 1152 (1996).
21. J. Hong and G. Turban, Diamond Relat. Mater. 8, 572 (1999).
22. F. Weich, J. Widani, and T.H. Frauenheim, Phys. Rev. Lett. 78, 3326 (1997).
23. J. Krug, Adv. Phys. 46, 139 (1997).
24. T. Halpin-Healy and Y.-C. Zhang, Phys. Rep. 254, 215 (1995).
25. A.-L. Barabási and H. E. Stanley, Fractal Concepts in Surface Growth (Cambridge University Press, New York, 1995).
26. P. Meakin, Phys. Rep. 235, 189 (1993).
27. F. Family and T. Vicsek, J. Phys. A 18, L75 (1985).
28. W. Wang and H.A. Cerdeira, Phys. Rev. E 47, 3357 (1993).
29. A. von Keudell and W. Moller, J. Appl. Phys. 75, 7718 (1994).
30. G.J. Vandentrop, M. Kawasaky, R.M. Nix, I.G. Brown, M. Salmeron, and G.A. Somorjay, Phys. Rev. B 41, 3200 (1990).
31. K.-R. Lee, K.Y. Eun, and J.-S. Rhee, Mater. Res. Soc. Symp. Proc. 356, 233 (1995).
32. M. Weiler, S. Sattel, T. Giessen, K. Jung, H. Erhardt, V.S. Veerasamy, and J. Robertson, Phys. Rev. B 53, 1594 (1996).
33. J.W. Zou, K. Schmidt, K. Reichelt, and B. Dischler, J. Appl. Phys. 67, 487 (1990).
34. J.W. Zou, K. Reichelt, K. Schmidt, and B. Dischler, J. Appl. Phys. 65, 3914 (1989).
35. M.A. Makeev and A.-L. Barabäsi, Appl. Phys. Lett. 71, 2800 (1997)
36. Appl. Phys. Lett.M.A. MakeevA.-L. Barabäsi72, 906 (1998)
37. Appl. Phys. Lett.M.A. MakeevA.-L. Barabäsi73, 1445 (1998).