메뉴 건너뛰기




Volumn , Issue , 2008, Pages 265-268

3D multichannels and stacked nanowires technologies for new design opportunities in nanoelectronics

Author keywords

CMOS; CMOS scaling; FinFET; Multichannel; PhiFET

Indexed keywords

ELECTRIC WIRE; ELECTRONICS INDUSTRY; INTEGRATED CIRCUIT MANUFACTURE; MOSFET DEVICES; TECHNOLOGY;

EID: 51849161404     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICICDT.2008.4567292     Document Type: Conference Paper
Times cited : (14)

References (24)
  • 1
    • 37749045191 scopus 로고    scopus 로고
    • 122 Mb High Speed SRAM Cell with 25 nm Gate Length Multi-Bridge-Channel. MOSFET (MBCFET) on Bulk Si. Substrate
    • M. S. Kim et al. "122 Mb High Speed SRAM Cell with 25 nm Gate Length Multi-Bridge-Channel. MOSFET (MBCFET) on Bulk Si. Substrate", in VLSI Tech. Symp. Dig.., pp. 68-69, 2006
    • (2006) VLSI Tech. Symp. Dig , pp. 68-69
    • Kim, M.S.1
  • 2
    • 51949096074 scopus 로고    scopus 로고
    • Novel integration process and performances analysis of Low STandby Power (LSTP) 3D Multi-Channel CMOSFET (MCFET) on SOI with Metal / High-K Gate stack, in VLSI Tech. Symp. Dig
    • to be published
    • E. Bernard et al, "Novel integration process and performances analysis of Low STandby Power (LSTP) 3D Multi-Channel CMOSFET (MCFET) on SOI with Metal / High-K Gate stack", in VLSI Tech. Symp. Dig., to be published, 2008
    • (2008)
    • Bernard, E.1
  • 3
    • 51849158036 scopus 로고    scopus 로고
    • 2/TiN gate stack, in IEDM Tech. Dig., pp. 997-999, 2006
    • 2/TiN gate stack", in IEDM Tech. Dig., pp. 997-999, 2006
  • 4
    • 39549113174 scopus 로고    scopus 로고
    • Impact of the gate stack on the electrical performances of 3D Multi-Channel MOSFET (MCFET) on SOI
    • E. Bernard et al., "Impact of the gate stack on the electrical performances of 3D Multi-Channel MOSFET (MCFET) on SOI", in ESSDERC Proc., pp. 997-999, 2007.
    • (2007) ESSDERC Proc , pp. 997-999
    • Bernard, E.1
  • 5
    • 40849134313 scopus 로고    scopus 로고
    • 3D nanowire gate-all-around transistors: Specific integration and electrical, features
    • C. Dupré et al. "3D nanowire gate-all-around transistors: Specific integration and electrical, features", In Solid-State Electronics, vol. 52, no.4, pp. 519-525. 2008.
    • (2008) In Solid-State Electronics , vol.52 , Issue.4 , pp. 519-525
    • Dupré, C.1
  • 6
    • 51849163867 scopus 로고    scopus 로고
    • S. Harrison et al, Highly performant double gate MOSFET realized with SON process, in IEDM Tech. Dig. pp. 18.6.1.-18.6.4, 2003.
    • S. Harrison et al, "Highly performant double gate MOSFET realized with SON process", in IEDM Tech. Dig. pp. 18.6.1.-18.6.4, 2003.
  • 7
    • 51849100992 scopus 로고    scopus 로고
    • Sub 50-nm FinFET: PMOS, in
    • X. Haung et al "Sub 50-nm FinFET: PMOS, in IEDM Tech. Dig., pp. 67-70, 2000.
    • (2000) IEDM Tech. Dig , pp. 67-70
    • Haung, X.1
  • 8
    • 0141761518 scopus 로고    scopus 로고
    • Tri-Gate fully-depleted CMOS transistors: Fabrication, design and layout
    • B. Doyle et al. "Tri-Gate fully-depleted CMOS transistors: fabrication, design and layout", in VLSI Tech. Symp. Dig.., pp. 133-134, 2003.
    • (2003) VLSI Tech. Symp. Dig , pp. 133-134
    • Doyle, B.1
  • 9
    • 4544367603 scopus 로고    scopus 로고
    • 5nm-Gate Nanowire FinFE
    • F.-L. Yang et al, "5nm-Gate Nanowire FinFE" in VLSI Tech. Symp. Dig.., pp. 196-197, 2004
    • (2004) VLSI Tech. Symp. Dig , pp. 196-197
    • Yang, F.-L.1
  • 10
    • 33847734326 scopus 로고    scopus 로고
    • High performance 5nm radius Twin Silicon Nanowire MOSFET (TSNWFET) : Fabrication on bulk si wafer, characteristics, and reliability, in
    • S. D. Suk et al., "High performance 5nm radius Twin Silicon Nanowire MOSFET (TSNWFET) : fabrication on bulk si wafer, characteristics, and reliability", in IEDM Tech. Dig.,pp. 717-720, 2005.
    • (2005) IEDM Tech. Dig , pp. 717-720
    • Suk, S.D.1
  • 11
    • 43549127069 scopus 로고    scopus 로고
    • Stacked Nanowires ΦFET with Independent Gates: Novel Device for Ultra-dense Low Power Applications
    • C. Dupré et al., "Stacked Nanowires ΦFET with Independent Gates: Novel Device for Ultra-dense Low Power Applications", in IEEE Int. SOI conf. Proc., pp. 95-96, 2007.
    • (2007) IEEE Int. SOI conf. Proc , pp. 95-96
    • Dupré, C.1
  • 12
    • 84943197898 scopus 로고    scopus 로고
    • Impact of Random Dopant Fluctuation on Bulk CMOS 6-T SRAM Scaling
    • B. Cheng et al., "Impact of Random Dopant Fluctuation on Bulk CMOS 6-T SRAM Scaling", in ESSDERC Proc., pp. 258 - 261, 2006.
    • (2006) ESSDERC Proc , pp. 258-261
    • Cheng, B.1
  • 13
    • 40849143850 scopus 로고    scopus 로고
    • 3D stacked channels: How series resistances can limit 3D devices performance
    • E. Bernard et al. "3D stacked channels: how series resistances can limit 3D devices performance", in IEEE Int. SOI conf. Proc., pp. 93-94, 2007.
    • (2007) IEEE Int. SOI conf. Proc , pp. 93-94
    • Bernard, E.1
  • 14
    • 24144500757 scopus 로고    scopus 로고
    • Growth of SiGe/Si superlattices on silicon-on-insulator substrates for multi-bridge channel field effect transistors
    • J.-M. Hartman et al "Growth of SiGe/Si superlattices on silicon-on-insulator substrates for multi-bridge channel field effect transistors", Journal of Crystal Growth, vol. 283, pp. 57-67, 2005.
    • (2005) Journal of Crystal Growth , vol.283 , pp. 57-67
    • Hartman, J.-M.1
  • 15
    • 51849130833 scopus 로고    scopus 로고
    • Oxidation of Suspended Stacked Silicon Nanowires for Sub-10nm Cross-section Shape Optimization
    • th, E1
    • th ECS symposium proc., E1, 2008.
    • (2008) ECS symposium proc
    • Hubert, A.1
  • 16
    • 44949085361 scopus 로고    scopus 로고
    • Strained FDSOI CMOS technology scalability down to 2.5nm film thickness and 1.8nm gate length with a TiN/HfO2 gate stack, in
    • V. Barrai et al. "Strained FDSOI CMOS technology scalability down to 2.5nm film thickness and 1.8nm gate length with a TiN/HfO2 gate stack", in IEDM Tech. Dig., pp. 61-64, 2007.
    • (2007) IEDM Tech. Dig , pp. 61-64
    • Barrai, V.1
  • 17
    • 50249099761 scopus 로고    scopus 로고
    • Localized SOI technology: An innovative Low Cost self-aligned process for Ultra Thin Si-film on thin BOX integration for Low Power applications, in
    • S. Monfray et al "Localized SOI technology: an innovative Low Cost self-aligned process for Ultra Thin Si-film on thin BOX integration for Low Power applications", in IEDM Tech. Dig., pp. 693 - 696, 2007.
    • (2007) IEDM Tech. Dig , pp. 693-696
    • Monfray, S.1
  • 18
    • 36849006875 scopus 로고    scopus 로고
    • Hydrogen annealing of arrays of planar and vertically stacked Si nanowires
    • E. Dornel et al. "Hydrogen annealing of arrays of planar and vertically stacked Si nanowires", Appl. Phys. Lett. 91, 233502, 2007.
    • (2007) Appl. Phys. Lett , vol.91 , pp. 233502
    • Dornel, E.1
  • 19
    • 51849160141 scopus 로고    scopus 로고
    • A Breakthrough Electronic Lithography Process Through Si Layer for Self Aligning Gates in Planar Double-Gate Transistors for 32nm, in SSDM
    • R. Wacquez et al "A Breakthrough Electronic Lithography Process Through Si Layer for Self Aligning Gates in Planar Double-Gate Transistors for 32nm", in SSDM Tech. Dig., F-10-2, 2007
    • (2007) Tech. Dig , vol.F-10-2
    • Wacquez, R.1
  • 21
    • 51849165339 scopus 로고    scopus 로고
    • Sub-1V, Robust and Compact 6T SRAM cell in Double Gate MOS technology
    • O. Thomas et al. "Sub-1V, Robust and Compact 6T SRAM cell in Double Gate MOS technology", IEEE ISCAS, 2007.
    • (2007) IEEE ISCAS
    • Thomas, O.1
  • 22
    • 43749101516 scopus 로고    scopus 로고
    • FinFET SRAM with Enhanced Read / Write Margins
    • A. Carlson et al., "FinFET SRAM with Enhanced Read / Write Margins", IEEE SOI Conference, 2006.
    • (2006) IEEE SOI Conference
    • Carlson, A.1
  • 23
    • 36049028738 scopus 로고    scopus 로고
    • Double-Gate MOSFET Based Reconfigurable Cells
    • I. Hassoune et al. "Double-Gate MOSFET Based Reconfigurable Cells" Electronics letters, vol. 43, no. 23, 2007.
    • (2007) Electronics letters , vol.43 , Issue.23
    • Hassoune, I.1
  • 24
    • 51849153991 scopus 로고    scopus 로고
    • Analog Design Considerations For Independently Driven Double Gate MOSfets And Their Application in a Low-Voltage OTA
    • P.Freitas et al, ""Analog Design Considerations For Independently Driven Double Gate MOSfets And Their Application in a Low-Voltage OTA", IEEE ICECS, 2007.
    • (2007) IEEE ICECS
    • Freitas, P.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.