Dielectric discharging processes in RF-MEMS capacitive switches

Asia-Pacific Microwave Conference Proceedings, APMC

Volumn , Issue , 2007, Pages

  Papaioannou, George ^a   Papandreou, Eleni ^a   Papapolymerou, John ^b   Daigler, Richard ^b  

^a UNIVERSITY OF ATHENS   (Greece)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Dielectric polarization; Microelectromechani cal devices; Reliability; Surface charging

Indexed keywords

DIELECTRIC FILMS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROWAVES; POLARIZATION; SILICON NITRIDE; SURFACE CHARGE;

BIAS POLARITIES; CAPACITIVE SWITCHES; DIELECTRIC POLARIZATION; DISCHARGING PROCESS; RF-MEMS; SURFACE CHARGING; THERMALLY ACTIVATED MECHANISMS; TIME CONSTANTS;

TIME SWITCHES;

EID: 51849110280     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/APMC.2007.4554527     Document Type: Conference Paper

References (14)

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