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Volumn , Issue , 2007, Pages

Dielectric discharging processes in RF-MEMS capacitive switches

Author keywords

Dielectric polarization; Microelectromechani cal devices; Reliability; Surface charging

Indexed keywords

DIELECTRIC FILMS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROWAVES; POLARIZATION; SILICON NITRIDE; SURFACE CHARGE;

EID: 51849110280     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/APMC.2007.4554527     Document Type: Conference Paper
Times cited : (9)

References (14)
  • 2
    • 0032208481 scopus 로고    scopus 로고
    • Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS)
    • J Wibbeler, G Pfeifer and M Hietschold, "Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS)", Sensors Actuators, vol. A71, pp. 74-80, 1998
    • (1998) Sensors Actuators , vol.A71 , pp. 74-80
    • Wibbeler, J.1    Pfeifer, G.2    Hietschold, M.3
  • 11
    • 34250703152 scopus 로고    scopus 로고
    • Dielectric charging in radio frequency microelectromechanical system capacitive switches: A study of material properties and device performance
    • G. Papaioannou, J. Papapolymerou, P. Pons and R. Plana, "Dielectric charging in radio frequency microelectromechanical system capacitive switches: A study of material properties and device performance", Applie Physics Letters vol. 90, pp. 233507-1-233507-4, 2007
    • (2007) Applie Physics Letters , vol.90
    • Papaioannou, G.1    Papapolymerou, J.2    Pons, P.3    Plana, R.4
  • 13
    • 2342642163 scopus 로고    scopus 로고
    • W Merlijn van Spengen, Robert Puers, Robert Mertens and Ingrid de Wolf, A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches, J. Micromech. Microeng., 14, pp. 514-521, 2004
    • W Merlijn van Spengen, Robert Puers, Robert Mertens and Ingrid de Wolf, "A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches", J. Micromech. Microeng., vol. 14, pp. 514-521, 2004
  • 14
    • 51849155802 scopus 로고    scopus 로고
    • Vandershueren J and Casiot J In: Braunlich P (Ed.) Topics in Applied Physics: Thermally stimulated relaxation in solids, Springer-Verlag, Berlin, 1979, 37, ch. 4, pp. 135
    • Vandershueren J and Casiot J In: Braunlich P (Ed.) Topics in Applied Physics: "Thermally stimulated relaxation in solids", Springer-Verlag, Berlin, 1979, vol. 37, ch. 4, pp. 135


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.