Effects of a thin Au Interlayer on the formation of low-resistivity CoSi2 on (001)Si substrate

Thin Solid Films

Volumn 516, Issue 23, 2008, Pages 8797-8803

  Cheng, S L ^a   Chen, H Y ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

Interlayer; Nucleation; Phase transformation; Silicide; Thin film

Indexed keywords

COBALT; SILICIDES; SILICON; THICK FILMS; TRANSITION METALS;

INTERLAYER; NUCLEATION; PHASE TRANSFORMATION; SILICIDE; THIN FILM;

GOLD;

EID: 51049089296     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.06.057     Document Type: Article

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