메뉴 건너뛰기




Volumn 52, Issue 10, 2008, Pages 1536-1541

Impact of high-κ dielectric and metal nanoparticles in simultaneous enhancement of programming speed and retention time of nano-flash memory

Author keywords

Flash memory; High dielectric; Metal nanocrystal; Tunneling

Indexed keywords

CONDUCTION BANDS; DATA STORAGE EQUIPMENT; DIELECTRIC MATERIALS; ELECTRIC CONDUCTIVITY; ELECTRON MOBILITY; ELECTRON TUNNELING; EXCAVATION; HEAT CONDUCTION; HETEROJUNCTIONS; METALS; MODEL STRUCTURES; NANOCRYSTALLINE ALLOYS; NANOCRYSTALS; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NANOTECHNOLOGY; QUANTUM CHEMISTRY; SILVER; SPEED; STRUCTURAL METALS; TUNNELING (EXCAVATION); WORK FUNCTION;

EID: 50849137148     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2008.06.028     Document Type: Article
Times cited : (6)

References (18)
  • 2
    • 0036477431 scopus 로고    scopus 로고
    • JVD silicon nitride as tunnel dielectric in p-channel flash memory
    • She M., and King T.-J. JVD silicon nitride as tunnel dielectric in p-channel flash memory. IEEE Electron Dev Lett 23 (2002) 91-93
    • (2002) IEEE Electron Dev Lett , vol.23 , pp. 91-93
    • She, M.1    King, T.-J.2
  • 3
    • 17444382701 scopus 로고    scopus 로고
    • Metal nanocrystal memory with high-κ tunneling barrier for improved data retention
    • Lee J.J., and Kwong D.-L. Metal nanocrystal memory with high-κ tunneling barrier for improved data retention. IEEE Trans Electron Dev 52 (2005) 507-511
    • (2005) IEEE Trans Electron Dev , vol.52 , pp. 507-511
    • Lee, J.J.1    Kwong, D.-L.2
  • 4
    • 0041409576 scopus 로고    scopus 로고
    • Impact of crystal size and tunnel dielectric on semiconductor nanocrystal memory performance
    • She M., and King T.-J. Impact of crystal size and tunnel dielectric on semiconductor nanocrystal memory performance. IEEE Trans Electron Dev 50 (2003) 1934-1940
    • (2003) IEEE Trans Electron Dev , vol.50 , pp. 1934-1940
    • She, M.1    King, T.-J.2
  • 5
    • 8144221080 scopus 로고    scopus 로고
    • Nonvolatile flash memory device using Ge nanocrystals embedded in HfAlO high-κ tunneling and control oxides: device fabrication and electrical performance
    • Chen J.H., Wang Y.Q., Yoo W.J., Yeo Y.-C., Samudra G., Chan D.S., et al. Nonvolatile flash memory device using Ge nanocrystals embedded in HfAlO high-κ tunneling and control oxides: device fabrication and electrical performance. IEEE Trans Electron Dev 51 (2004) 1840-1848
    • (2004) IEEE Trans Electron Dev , vol.51 , pp. 1840-1848
    • Chen, J.H.1    Wang, Y.Q.2    Yoo, W.J.3    Yeo, Y.-C.4    Samudra, G.5    Chan, D.S.6
  • 6
    • 0036714604 scopus 로고    scopus 로고
    • Metal nanocrystal memories - Part I: device design and fabrication
    • Liu Z., Lee C., Narayanan V., Pei G., and Kan Edwin C. Metal nanocrystal memories - Part I: device design and fabrication. IEEE Trans Electron Dev 49 (2002) 1606-1613
    • (2002) IEEE Trans Electron Dev , vol.49 , pp. 1606-1613
    • Liu, Z.1    Lee, C.2    Narayanan, V.3    Pei, G.4    Kan Edwin, C.5
  • 7
    • 33845928903 scopus 로고    scopus 로고
    • Design optimization of metal nanocrystal memory - Part I: nanocrystal array engineering
    • Hou T.-H., Lee c., Narayanan V., Ganguly U., and Kan Edwin C. Design optimization of metal nanocrystal memory - Part I: nanocrystal array engineering. IEEE Trans Electron Dev 53 (2006) 3095-3102
    • (2006) IEEE Trans Electron Dev , vol.53 , pp. 3095-3102
    • Hou, T.-H.1    Lee, c.2    Narayanan, V.3    Ganguly, U.4    Kan Edwin, C.5
  • 8
    • 33947195403 scopus 로고    scopus 로고
    • Design optimization of metal nanocrystal memory - Part II: gate-stack engineering
    • Hou T.-H., Lee c., Narayanan V., Ganguly U., and Kan Edwin C. Design optimization of metal nanocrystal memory - Part II: gate-stack engineering. IEEE Trans Electron Dev 53 (2006) 103-109
    • (2006) IEEE Trans Electron Dev , vol.53 , pp. 103-109
    • Hou, T.-H.1    Lee, c.2    Narayanan, V.3    Ganguly, U.4    Kan Edwin, C.5
  • 9
    • 13544264528 scopus 로고    scopus 로고
    • 2 and N-assisted Ni confinement for nonvolatile memory application
    • 2 and N-assisted Ni confinement for nonvolatile memory application. Appl Phys Lett 86 (2005) 013 107
    • (2005) Appl Phys Lett , vol.86
    • Tan, Z.1    Samanta, s.2    Yoo, W.3    Lee, S.4
  • 12
    • 0000231339 scopus 로고
    • Tunneling through a one-dimensional potential barrier
    • Zafar A. Tunneling through a one-dimensional potential barrier. Phys Rev A 47 (1993) 4761-4767
    • (1993) Phys Rev A , vol.47 , pp. 4761-4767
    • Zafar, A.1
  • 13
    • 0005347592 scopus 로고
    • Transmission line analogy of resonance tunneling phenomena: the generalized impedance concept
    • Khondoker A.N., Rezwan Khan M., and Anwar A.F.M. Transmission line analogy of resonance tunneling phenomena: the generalized impedance concept. J Appl Phys 63 (1988) 5191-5193
    • (1988) J Appl Phys , vol.63 , pp. 5191-5193
    • Khondoker, A.N.1    Rezwan Khan, M.2    Anwar, A.F.M.3
  • 14
    • 0037100834 scopus 로고    scopus 로고
    • Effects of inelastic scattering on direct tunneling gate leakage current in deep submicron metal-oxide-semiconductor transistors
    • Alam K., Zaman S., Chowdhury M.M., Khan M.R., and Haque A. Effects of inelastic scattering on direct tunneling gate leakage current in deep submicron metal-oxide-semiconductor transistors. J Appl Phys 92 (2002) 937-943
    • (2002) J Appl Phys , vol.92 , pp. 937-943
    • Alam, K.1    Zaman, S.2    Chowdhury, M.M.3    Khan, M.R.4    Haque, A.5
  • 15
    • 6244304433 scopus 로고
    • Tunneling in finite superlattice
    • Tsu R., and Esaki L. Tunneling in finite superlattice. Appl Phys Lett 22 (1973) 562-564
    • (1973) Appl Phys Lett , vol.22 , pp. 562-564
    • Tsu, R.1    Esaki, L.2
  • 16
    • 18744406968 scopus 로고    scopus 로고
    • Band offsets and Schottky barrier heights of high dielectric constant oxides
    • Peacock P.W., and Robertson J. Band offsets and Schottky barrier heights of high dielectric constant oxides. J Appl Phys 92 (2002) 4712-4721
    • (2002) J Appl Phys , vol.92 , pp. 4712-4721
    • Peacock, P.W.1    Robertson, J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.