Comparative study of niobium nitride coatings deposited by unbalanced and balanced magnetron sputtering

Thin Solid Films

Volumn 516, Issue 23, 2008, Pages 8319-8326

  Olaya, J J ^a   Rodil, S E ^b   Muhl, S ^b  

^a UNIVERSIDAD NACIONAL DE COLOMBIA   (Colombia)

^b UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

Author keywords

Corrosion; Crystal orientation; Hardness; Niobium nitride; Unbalanced sputtering

Indexed keywords

ARSENIC COMPOUNDS; CHEMICAL COMPOUNDS; CHEMICAL PROPERTIES; CHLORINE COMPOUNDS; ELECTRIC CONDUCTIVITY; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; MELTING POINT; NIOBIUM; NITRIDES; SUPERCONDUCTING TRANSITION TEMPERATURE; THERMOCHEMISTRY; THICK FILMS; TRANSITION METALS;

APPLICATIONS.; CHEMICAL INERTNESS; COMPARATIVE STUDIES; CORROSION; CRYSTAL ORIENTATION; HARDNESS; HIGH ELECTRICAL CONDUCTIVITY; HIGH-MELTING POINTS; NIOBIUM NITRIDE; SUPERCONDUCTING TRANSITIONS; UNBALANCED SPUTTERING;

NIOBIUM COMPOUNDS;

EID: 50849118130     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.03.043     Document Type: Article

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