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Polymer micro piezo valve with a small. dead volume
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A Universal Electromagnetic Microactuator Using Magnetic Interconnection Concepts
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Ducloux Olivier, Talbi Abdelkrim, Deblock Yves, Gimeno Leticia, Tiercelin Nicolas, Pernod Philippe, Preobrazhensky Vladimir, and Merlen Alain, Magnetically actuated microvalve for active flow control, J. Physics: Conference Series, 34 (2006), pp. 631-636.
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Magnetically actuated micropumps using an Fe-PDMS composite membrane
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