Design and prototyping of a surface micromachined parylene microvalve with hybrid actuation scheme: On-chip thermopneumatic initiation and electrostatic latching

Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences

Volumn 1, Issue , 2005, Pages 1192-1194

  Ryu, K S ^a   Wang, X ^a   Shaikh, K ^a   Goluch, E ^a   Mathias, P ^a   Liu, C ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

Electrostatic; Parylene; Thermopneumatic; Valve

Indexed keywords

CHEMICAL ANALYSIS; COPYRIGHTS; ELECTROSTATIC ACTUATORS; ELECTROSTATICS;

ELECTROSTATIC ACTUATION; HYBRID ACTUATION; MICRO FLUIDIC SYSTEM; MICRO VALVES; MICRO-MACHINED; PARYLENES; SURFACE MICROMACHINED MEMS; THERMOPNEUMATIC;

VALVES (MECHANICAL);

EID: 42549083480     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)