Rhombic-shaped thermal actuator array for evenly-distributed very large displacement

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 663-666

  Yu, A B ^a   Zhang, X M ^a   Cai, H ^a   Zhang, Q X ^b   Liu, A Q ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

MEMS; PHOTONIC DEVICES;

LARGE DISPLACEMENTS; SUB-WAVELENGTH; THERMAL ACTUATOR; TUNABLE GRATING;

ACTUATORS;

EID: 50049090584     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.2007.4433084     Document Type: Conference Paper

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