Deformable MEMS grating for wide tunability and high operating speed

Journal of Optics A: Pure and Applied Optics

Volumn 8, Issue 7, 2006, Pages

  Tormen, Maurizio ^a   Peter, Yves Alain ^b   Niedermann, Philippe ^a   Hoogerwerf, Arno ^a   Stanley, Ross ^a  

^a CSEM   (Switzerland)

^b ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

MEMS grating; Tunable laser

Indexed keywords

CASCADE CONTROL SYSTEMS; ELECTROSTATICS; LASER APPLICATIONS; MICROELECTROMECHANICAL DEVICES; SWITCHING; TUNING;

ELECTROSTATIC ACTUATION; MEMS GRATING; QUANTUM-CASCADE LASER; TUNABLE LASER;

DIFFRACTION GRATINGS;

EID: 33745212859     PISSN: 14644258     EISSN: 17413567     Source Type: Journal    
DOI: 10.1088/1464-4258/8/7/S07     Document Type: Article

References (9)

1. Schenk H et al 2004 Photonic microsystems: an enabling technology for light deflection and modulation Proc. SPIE 5348 7-21
2. Van Kessel P F et al 1998 A MEMS-based projection display Proc. IEEE 86 1687-704
3. Dürr P et al 1999 Micromirror spatial light modulators Proc. MOEMS' 99 pp60-5
4. www.siliconlight.com
5. www.polychromix.com/html/products.htm
6. Anthon D et al 2002 External cavity diode lasers tuned with silicon MEMS OFC 2002 (March 2002) pp97-8
7. Zhang X M and Liu A Q 2000 A MEMS pitch-tunable grating add/drop multiplexers Optical MEMS 2000 (August 2000) pp25-6
8. Chee W et al 2003 Analog tunable gratings driven by thin-film piezoelectric microelectromechanical actuators Appl. Opt. 42 621-6
9. Chee W et al 2004 Analog piezoelectric-driven tunable gratings with nanometer resolution J. Microelectromech. Syst. 13 998-1005