Study of the pull-in voltage for MEMS parallel plate capacitor actuators

Materials Research Society Symposium - Proceedings

Volumn 782, Issue , 2003, Pages 355-361

  Saucedo Flores, Emmanuel ^a   Ruelas, Rubén ^a   Flores, Martín ^a   Chiao, Jung Chih ^b  

^a UNIVERSITY OF GUADALAJARA   (Mexico)

^b UNIVERSITY OF TEXAS AT ARLINGTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CAPACITORS; DIELECTRIC MATERIALS; ELECTRODES; ELECTROSTATICS; PARAMETER ESTIMATION;

DIELECTRIC LAYERS; PARALLEL PLATE CAPACITORS; PULL-IN VOLTAGE;

MICROELECTROMECHANICAL DEVICES;

EID: 2942694371     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-782-a5.86     Document Type: Conference Paper

References (3)

1. Olivier Français, "Analysis of an Electrostatic Microactuator with the help of Matlab/simulink: transient and frequency characteristics". MSM2000, San Diego, CA, USA, March 27-29, 2000, pp 281-284.
2. O. Solgaard, EE321 MEMS Design Course, Chapter 6 Non Linear Dynamics, April 2003. Standford University.
3. David K. Cheng, Fundamentals of Engineering Electromagnetics Ch. 3, Adison-Wesley USA, 1993, ISBN 968 444 327.