Micro-opto-mechanical grating switches

Sensors and Actuators, A: Physical

Volumn 86, Issue 1-2, 2000, Pages 127-134

  Liu, A Q ^a   Zhao, B ^b   Chollet, F ^a   Zou, Q ^a   Asundi, A ^b   Fujita, H ^c  

^a INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DIFFRACTION GRATINGS; ELECTROSTATIC DEVICES; FIBER OPTICS; MICROOPTICS; MIRRORS; OPTICAL SWITCHES; SILICON WAFERS; WAVELENGTH DIVISION MULTIPLEXING;

MICROOPTOMECHANICAL GRATINGS; SWITCHING SPEED;

MICROELECTROMECHANICAL DEVICES;

EID: 0034297781     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00404-0     Document Type: Article

References (9)

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