Determining mechanical properties of thin films from the loading curve of nanoindentation testing

Thin Solid Films

Volumn 516, Issue 21, 2008, Pages 7571-7580

  Zhao, Manhong ^a   Xiang, Yong ^b   Xu, Jessica ^b   Ogasawara, Nagahisa ^c   Chiba, Norimasa ^c   Chen, Xi ^a  

^a Columbia University ^*  (United States)

^b INTEL CORPORATION   (United States)

^c NATIONAL DEFENSE ACADEMY   (Japan)

Author keywords

Elastic property; Nanoindentation; Plastic property; Thin film

Indexed keywords

DIFFERENCE EQUATIONS; EXTRACTION; NANOINDENTATION; PLASTICS; STRAIN HARDENING; TESTING; THICK FILMS; THIN FILM DEVICES; THIN FILMS; UNLOADING; VAPOR DEPOSITION;

BULGE TESTING; ELASTIC PROPERTY; ELASTO-PLASTIC PROPERTIES; FILM PROPERTIES; INDENTATION DEPTHS; INDENTATION TESTING; LOADING CURVES; MATE RIAL PROPERTIES; NANOINDENTATION TESTING; PLASTIC PROPERTIES; PLASTIC PROPERTY; POST-PROCESSING; REVERSE ANALYSIS; SHARP INDENTATION; SUBSTRATE EFFECTS; THIN FILM; UNLOADING CURVES; WORK-HARDENING;

MECHANICAL PROPERTIES;

EID: 49349116985     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.03.018     Document Type: Article

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