Indentation plastic displacement field: Part II. The case of hard films on soft substrates

Journal of Materials Research

Volumn 14, Issue 6, 1999, Pages 2204-2209

  Tsui, T Y ^a   Vlassak, Joost ^b   Nix, William D ^b  

^a ADVANCED MICRO DEVICES   (United States)

^b Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM ALLOYS; DENSITY (SPECIFIC GRAVITY); FINITE ELEMENT METHOD; HIGH RESOLUTION ELECTRON MICROSCOPY; ION BEAMS; MECHANICAL PROPERTIES; MULTILAYERS; PLASTIC DEFORMATION; PORE SIZE; PRESSURE; SUBSTRATES; TITANIUM;

HARD FILMS; MICROGRAPHS; MULTILAYERED FILM THICKNESS; SOFT SUBSTRATES; STRESS INDUCED VOID;

THIN FILMS;

EID: 0032662723     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1999.0296     Document Type: Article

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