Analysis of the air-damping effect on a micromachined beam resonator

Mathematics and Mechanics of Solids

Volumn 8, Issue 3, 2003, Pages 315-325

  Zhang, Chuanli ^a   Xu, Guanshui ^a   Jiang, Qing ^a  

^a University of California Riverside   (United States)

Author keywords

Air damping; Beam resonator; Quality factor; Resonant frequency

Indexed keywords

BEAMS AND GIRDERS; FREQUENCY RESPONSE; MICROMACHINING; NATURAL FREQUENCIES; VIBRATIONS (MECHANICAL);

AIR-DAMPING;

RESONATORS;

EID: 0038717299     PISSN: 10812865     EISSN: None     Source Type: Journal    
DOI: 10.1177/1081286503008003006     Document Type: Review

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