Very thin poly-SiC films for micro/nano devices

Journal of Nanoscience and Nanotechnology

Volumn 8, Issue 6, 2008, Pages 3063-3067

  Fu, Xiao An ^a   Noh, Sangsoo ^a   Chen, Li ^a   Mehregany, Mehran ^a  

^a Case Western Reserve University   (United States)

Author keywords

LPCVD; Micro nano devices; Poly Sic; SiC; Silicon carbide; Thin films

Indexed keywords

LOW-STRESS; LPCVD; MICRO/NANO DEVICES; NITROGEN-DOPED; POLY-SIC; POLYCRYSTALLINE SILICON CARBIDE; SIC; SIC FILMS; THIN FILMS;

MOLECULAR BEAM EPITAXY; NITROGEN; NONMETALS; POLYCRYSTALLINE MATERIALS; POLYSILICON; SILICON; SILICON WAFERS;

SILICON CARBIDE;

EID: 48949087107     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2008.220     Document Type: Article

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