Speckle correlation method for 3D-deflection measurement of the tactile-optical microprobe

Proceedings of the 21st Annual ASPE Meeting, ASPE 2006

Volumn , Issue , 2006, Pages

  Wissmann, Mark ^a   Schwenke, Heinrich ^a   Neuschaefer Rube, Ulrich ^a  

^a Physikalisch Technische Bundesanstalt (PTB)   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84884772747     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. Schwenke, H., Neuschaefer-Rube, U., Kunzmann, H. and Pfeifer, T., 2002, Optical Methods for Dimensional Metrology in Production Engineering, CIRP Annals, 51, 2, 2002, 685-699.
2. Weckenmann, A., Estler, T., Peggs, G. and McMurtry, D., 2004, Probing Systems in Dimensional Metrology, STC P, CIRP Annals, 51, 2, 2004, p. 657.
3. Ji, G., Schwenke, H. and Trapet, E., 1998, Opto- Tactile Sensor for Measuring Small Structures on Coordinate Measuring Machines, Proc. of the 1998 Annual Meeting of ASPE, St. Louis, USA.
4. Werth Messtechnik GmbH Gießen, Germany, www.werthmesstechnik.de.
5. Schwenke, H., Neuschaefer-Rube, U. and Wissmann, M., 2006, Tactile Probing of Micro Features - Recent Advances in the Development of the Tactile-Optical Microprobe, Proc. of the 7th conference on Coordinate Metrology, 2006, Bielsko, Poland.
6. German Patent, DE 10 2005 021 645 A1.
7. Foroosh, H., Zerubia, J. and Berthold, M., 2002, Extension of Phase Correlation to Subpixel Registration, IEEE Transactions on Image Processing, Vol. 11, No. 3.
8. ISO 10360-2 (2001): Geometrical Product Specifications (GPS) - Acceptance and reverification tests for coordinate measuring machines (CMM) - Part 2: CMMs used for measuring size.