Evaluation of laser trapping probe properties for coordinate measurement

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6375, Issue , 2006, Pages

  Michihata, Masaki ^a   Takaya, Yasuhiro ^a   Miyoshi, Takashi ^a   Hayashi, Terutake ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Coordinate measurement; Laser trapping; Nano CMM; Position detecting probe; Standing wave

Indexed keywords

LASER APPLICATIONS; MICROELECTRONICS; PARAMETER ESTIMATION; PROBES;

COORDINATE MEASUREMENT; LASER TRAPPING PROBES; POSITION DETECTING PROBES; STANDING WAVES;

COORDINATE MEASURING MACHINES;

EID: 33846206893     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.689750     Document Type: Conference Paper

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