Vibrational probing technique for the nano-CMM based on optical radiation pressure control

CIRP Annals - Manufacturing Technology

Volumn 53, Issue 1, 2004, Pages 421-424

  Takaya, Y ^a   Imai, K ^a   Ha, T ^a   Miyoshi, T ^a   Kinoshita, N ^b  

^a OSAKA UNIVERSITY   (Japan)

^b NONE

Author keywords

Micro probe; Nano CMM; Optical measurement

Indexed keywords

COORDINATE MEASURING MACHINES; ION BEAMS; LASER BEAMS; SCANNING; SILICA; VIBRATIONS (MECHANICAL);

MICRO PROBES; NANO CMM; OPTICAL MEASUREMENT;

NANOTECHNOLOGY;

EID: 3142693395     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)60730-6     Document Type: Article

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