Position sensitivity of micro probe with transverse: Vibration using optical trap

VDI Berichte

Volumn , Issue 1844, 2004, Pages

  Imai, Keijiro ^a,b   Takaya, Y ^a   Miyoshi, T ^a   Ha, T ^a   Rimura, K ^a  

^a Mechanical Engineering and Systems ^*

^b OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC DEVICES; BACKSCATTERING; COORDINATE MEASURING MACHINES; LASER BEAMS; LASERS; NATURAL FREQUENCIES; OSCILLATIONS; POSITION MEASUREMENT; RADIATION; SIGNAL PROCESSING; SILICA; SILICON WAFERS;

ACOUSTO-OPTICAL DEFLECTORS (AOD); MICRO-ELECTRO MECHANICAL SYSTEMS (MEMS); NANOMETERS; YAG LASER;

PROBES;

EID: 19444379189     PISSN: 00835560     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

References (5)

1. K.Takamasu, et al.,"Basic Concept of Nano-CMM", Proc. of The Japan-China Bilateral Symposium on Advanced Manufacturing Engineering, (1996) pp.155-158
2. Y.Takaya, et al., "The Laser Trapping Probe for Nano-CMM (1st Report)", J Japan Soc Pre Eng, 66(7) (2000) pp. 1081-1086
3. Y.Takaya, et al., "The Microprobe for Nano-Positional Detection Using Optically Forced Vibration Method", Proc. of ASPE2002 annual Meeting pp.367-372
4. A.Ashkin, et al., "Observation of a single-beam gradient force optical trap for dielectric particles", Opt. Let.,11,(1986) pp.288-290
5. B.A.Nemet, et al., "Measuring microscopic viscosity with optical tweezers as a confocal probe",42(10)(2003) pp. 1820-1832