Berkovich indentation of diamondlike carbon coatings on silicon substrates

Journal of Materials Research

Volumn 23, Issue 7, 2008, Pages 1862-1869

  Haq, Ayesha J ^a   Monroe, P R ^a   Hoffman, M ^a   Martin, P J ^b   Bendavid, A ^b  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

^b CSIRO   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBES; CHEMICAL VAPOR DEPOSITION; CLADDING (COATING); COATINGS; DEFORMATION; ELECTRIC LOAD MANAGEMENT; INTERMETALLICS; LITHOGRAPHY; MANGANESE COMPOUNDS; NONMETALS; PHASE TRANSITIONS; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASTIC COATINGS; PLASTIC DEFORMATION; POLLUTION; PULSED LASER DEPOSITION; SILICON; STACKING FAULTS; VICKERS HARDNESS TESTING;

ANNULAR CRACKS; BERKOVICH INDENTATION; BERKOVICH INDENTER; CROSS SECTIONING; DEFORMATION BEHAVIORS; DIAMOND-LIKE CARBON; DIAMOND-LIKE CARBON COATINGS; DLC COATINGS; HIGHER LOADS; INDENTER; LOAD-DISPLACEMENT CURVES; MAXIMUM LOADS; PHASE TRANSFORMATION; PLASMA-ASSISTED CHEMICAL VAPOR DEPOSITION; SILICON SUBSTRATES; STACKING FAULTING; TOP SURFACE;

SUBSTRATES;

EID: 48749100852     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2008.0232     Document Type: Article

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