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Materials Letters

Volumn 58, Issue 26, 2004, Pages 3271-3275

Influence of the gas atmosphere on the microstructure and mechanical properties of diamond-like carbon films by arc ion plating

(7) Zou, Y S a Wang, W a Song, G H b Du, H a Gong, J a Huang, R F a Wen, L S a

a INSTITUTE OF METAL RESEARCH (China)

b SHENYANG UNIVERSITY OF TECHNOLOGY (China)

Author keywords

Arc ion plating; Diamond like carbon films; Mechanical properties; Microstructure; Raman spectra; X ray photoelectron spectra

Indexed keywords

DEPOSITION; HARDNESS; MICROSTRUCTURE; RAMAN SCATTERING; SPECTROMETERS; SUBSTRATES; X RAY PHOTOELECTRON SPECTROSCOPY;

ARC ION PLATING; ION ENERGY; MASS FLOW; NANOINDENTATION;

DIAMOND LIKE CARBON FILMS;

EID: 4444234832 PISSN: 0167577X EISSN: None Source Type: Journal
DOI: 10.1016/j.matlet.2004.06.017 Document Type: Article

Times cited : (18)

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