Nano-holes in silicon wafers using laser-induced surface plasmon polaritons

Journal of Nanoscience and Nanotechnology

Volumn 8, Issue 4, 2008, Pages 2163-2166

  Molian, Pal ^a   Zhiqun, Un ^a   Qingze, Zou ^a  

^a Iowa State University   (United States)

Author keywords

Nano holes; Plasmon; Silicon wafers

Indexed keywords

ALUMINA; ALUMINUM OXIDE; ASSOCIATIVE STORAGE; ELECTROMAGNETIC WAVE POLARIZATION; GOLD DEPOSITS; LASER BEAMS; NEODYMIUM LASERS; PHONONS; PHOTONS; PLASMONS; RANDOM ACCESS STORAGE; SURFACE PLASMON RESONANCE; SURFACE PLASMONS; THIN FILMS; YTTRIUM ALUMINUM GARNET;

COHERENT INTERFERENCE; ELECTRICAL FIELD; MASSIVELY PARALLELS; NANOHOLES; POROUS ALUMINA MEMBRANES; Q SWITCHED ND:YAG LASER; SILICON SUBSTRATES; SURFACE PLASMON POLARITONS;

SILICON WAFERS;

NANOMATERIAL; SILICON;

ARTICLE; CHEMISTRY; CONFORMATION; CRYSTALLIZATION; LASER; MACROMOLECULE; MATERIALS TESTING; METHODOLOGY; NANOTECHNOLOGY; PARTICLE SIZE; POROSITY; SURFACE PLASMON RESONANCE; SURFACE PROPERTY; ULTRASTRUCTURE;

CRYSTALLIZATION; LASERS; MACROMOLECULAR SUBSTANCES; MATERIALS TESTING; MOLECULAR CONFORMATION; NANOSTRUCTURES; NANOTECHNOLOGY; PARTICLE SIZE; POROSITY; SILICON; SURFACE PLASMON RESONANCE; SURFACE PROPERTIES;

EID: 47149115536     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (15)

1. C. R. K. Martian and D. M. Tennant. J. Vac. Sci. Technol. A 21, S207 (2003).
2. Y.-L. Loo, R. L. Willett, K. W. Baldwin, and J. A. Rogers, Appl. Phys. Lett. 81, 562 (2002).
3. Y.-L. Loo, R. L. Willett, K. W. Baldwin, and J. A. Rogers, J. Am. Chem. Soc. 124, 7654 (2002).
4. W. Zhang and S. Y Chou, Appl. Phys. Lett. 79, 845 (2001).
5. M. E. Andersen, R. K. Smith, Z. J. Donhauser, A. Hatzor, P. A. Lewis, L. P. Tan, H. Tanaka, M. W. Horn, and P. S. Weiss, J. Vac. Sci. Technol. B 20, 2739 (2002).
6. M. Hendon, R. Collins, R. Hollingsworth, P. Larson, and M. Johnson, Appl. Phys. Lett. 74, 141 (1999).
7. G. Wysocki, J. Heitz, and D. Bauerle, Appl. Phys. Lett. 84, 2025 (2004).
8. E. Betzig, J. K. Trautman, R. Wolfe, E. M. Gyorgy, P. L. Finn, M. H. Kryder, and C. H. Chang, Appl. Phys. Lett. 61, 142 (1992).
9. X. Luo and T Ishihara, Appl. Phys. Lett. 84, 4780 (2004).
10. W. Srituravanich, N. Fang, C. Sun, and X. Zhang, NanoLetters 4. 1085 (2004).
11. T. W. Ebbesen, H. J. Lezec, H. F. Ghaemi, T. Thio, and P. Wolff. Nature 391, 667 (1998).
12. S. H. Chang, S. K. Gray, and G. C. Schatz, Optics Express 13, 3150 (2005).
13. I. W. Hamley, Nanotechnology 14, R39 (2003).
14. F. Weigl, S. Fricker, H. Boyen, C. Dietrich, B. Koslowski, A. Plettl, O. Pursche, P. Ziemann, P. Walther, C. Hartmann, M. Ott, and M. Möller, Diamond and Related Material 15, 1689 (2006).
15. S. Brieger, O. Dubbers, S. Fricker, A. Manzke, C. Pfahler, A. Plettl. and P. Ziemann, Nanotechnology 17, 4991 (2006).