An approach for the fabrication of hexagonally ordered arrays of cylindrical nanoholes in crystalline and amorphous silicon based on the self-organization of polymer micelles

Nanotechnology

Volumn 17, Issue 19, 2006, Pages 4991-4994

  Brieger, Sabrina ^a   Dubbers, Oliver ^a   Fricker, Sebastian ^a   Manzke, Achim ^a   Pfahler, Christian ^a   Plettl, Alfred ^a   Ziemann, Paul ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ASPECT RATIO; BLOCK COPOLYMERS; MICELLES; NANOSTRUCTURED MATERIALS; POLYSTYRENES;

CYLINDRICAL NANOHOLES; HOLE PATTERN; POLYMER MICELLES;

ARRAYS;

EID: 33748900042     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/17/19/036     Document Type: Article

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