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Volumn , Issue , 2006, Pages 107-112

Adaptive control of MEMS devices

Author keywords

Adaptive control; Micro comb resonator; Modeling; Parameter uncertainty; Tracking

Indexed keywords

CONTINUOUS-TIME MODEL REFERENCE ADAPTIVE CONTROLLERS; CONTROLLER DESIGNS; MICRO COMB RESONATORS; PARAMETER UNCERTAINTY;

EID: 38049161553     PISSN: 10258973     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (6)

References (16)
  • 3
    • 0029296809 scopus 로고
    • Surface micro machined micro engine
    • Garcia, et al., Surface micro machined micro engine. Sensors and Actuators, Vol. 48 (3) pp. 203- 214, 1995.
    • (1995) Sensors and Actuators , vol.48 , Issue.3 , pp. 203-214
    • Garcia1
  • 5
    • 0034427404 scopus 로고    scopus 로고
    • Through wafer optical probe characterization for micro electromechanically systems positional state monitoring and feedback control
    • December Pp
    • J. M. Dawson, J. Chen, K .S. Brown, P. Famouri, L. A. Hornak," Through wafer optical probe characterization for micro electromechanically systems positional state monitoring and feedback control," Optical engineering, Vol. 39, No. 12, December 2000 Pp 3239-3246.
    • (2000) Optical engineering , vol.39 , Issue.12 , pp. 3239-3246
    • Dawson, J.M.1    Chen, J.2    Brown, K.S.3    Famouri, P.4    Hornak, L.A.5
  • 6
    • 85088398658 scopus 로고    scopus 로고
    • MEMS Feed back Control Using through -Wafer Optical Device Monitoring
    • The international Society for Optical Engineering 18-20 September, Santa Clara, USA
    • J. Dawson, L. Wang, J. Chen, P. Famouri, and L. A. Hornak," MEMS Feed back Control Using through -Wafer Optical Device Monitoring," Proceeding of SPIE, The international Society for Optical Engineering Volume 1478. 18-20 September 2000, Santa Clara, USA.
    • (2000) Proceeding of SPIE , vol.1478
    • Dawson, J.1    Wang, L.2    Chen, J.3    Famouri, P.4    Hornak, L.A.5
  • 7
    • 38049175346 scopus 로고    scopus 로고
    • L. Wang, J. M. Dawson, J. Chen, P. Famouri, and L. A. Hornak, stroke-Length control of a MEMS device. ISIE2000, Cholula, Puebla, Mexico.
    • L. Wang, J. M. Dawson, J. Chen, P. Famouri, and L. A. Hornak, stroke-Length control of a MEMS device. ISIE2000, Cholula, Puebla, Mexico.
  • 8
    • 38049104118 scopus 로고    scopus 로고
    • J. Chen, P. Famouri, L. A. Hornak, nonlinear control of MEMS: microengine sliding mode control simulation. Proceeding of the IASTED international Conference, intelligent systems and control, October 28-30, 1999, Santa Barbara, California, USA.
    • J. Chen, P. Famouri, L. A. Hornak, nonlinear control of MEMS: microengine sliding mode control simulation. Proceeding of the IASTED international Conference, intelligent systems and control, October 28-30, 1999, Santa Barbara, California, USA.
  • 11
    • 0029214365 scopus 로고    scopus 로고
    • Micro-fabricated actuators and their application to optics
    • Pp
    • J. J. Sniegowski, E. J. Garcia, Micro-fabricated actuators and their application to optics. Proc SPIE Vol. 2384, Pp. 46- 64.
    • Proc SPIE , vol.2384 , pp. 46-64
    • Sniegowski, J.J.1    Garcia, E.J.2
  • 14
    • 0016117307 scopus 로고    scopus 로고
    • R. V. Monopoli, model reference applied control with on augmented error signal. IEEE Trans. on Automat. Contr. AC-19-pp 474-484 Oct. 1974.
    • R. V. Monopoli, model reference applied control with on augmented error signal. IEEE Trans. on Automat. Contr. Vol. AC-19-pp 474-484 Oct. 1974.
  • 15
    • 38049113706 scopus 로고    scopus 로고
    • J. M. Dawson. PhD dissertation West Virginia University, Integrated through Wafer Optical Monitoring of MEMS for closed loop Control (WVU, Morgantown, fall 2002).
    • J. M. Dawson. PhD dissertation West Virginia University, Integrated through Wafer Optical Monitoring of MEMS for closed loop Control (WVU, Morgantown, fall 2002).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.