Spectroscopic study of chemical phase separation in zirconium silicate alloys

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 4, 2003, Pages 1783-1791

  Rayner Jr , G B ^a,b   Kang, D ^a   Lucovsky, G ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

^b UCB 450   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON MICROSCOPY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PERMITTIVITY; PHASE SEPARATION; SPECTROSCOPIC ANALYSIS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

DIELECTRIC ALLOYS;

ZIRCONIUM ALLOYS;

EID: 0141458069     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1593646     Document Type: Conference Paper

References (13)

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