Band offset energies in zirconium silicate Si alloys

Applied Surface Science

Volumn 216, Issue 1-4 SPEC., 2003, Pages 215-222

  Lucovsky, Gerald ^a   Rayner, Bruce ^a   Zhang, Yu ^a   Appel, Gunther ^a   Whitten, Jerry ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

Auger electron spectroscopy; Plasma processing and deposition; Semiconductor dielectric band offset energies; X ray absorption spectroscopy; X ray photoelectron spectroscopy; Zirconium silicate alloys

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; COMPOSITION; DEPOSITION; ELECTRIC CURRENTS; ELECTRON TUNNELING; PERMITTIVITY; TRANSITION METALS; X RAY PHOTOELECTRON SPECTROSCOPY;

PLASMA PROCESSING;

ZIRCONIUM ALLOYS;

EID: 0037670120     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00429-X     Document Type: Conference Paper

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