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Volumn , Issue , 2006, Pages 1880-1886

Systems engineering and design of high-tech factories

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED ANALYSIS; COMPUTER AIDED DESIGN; COMPUTER CONTROL; ELECTRONICS INDUSTRY; INDUSTRIAL ENGINEERING; INDUSTRIAL PLANTS; MICROELECTRONICS; PRODUCT DEVELOPMENT; SYSTEMS ENGINEERING;

EID: 46149102030     PISSN: 08917736     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/WSC.2006.322969     Document Type: Conference Paper
Times cited : (7)

References (23)
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  • 2
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  • 5
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    • (1983) Solid State Technology , vol.26 , Issue.8 , pp. 173
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  • 10
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  • 11
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  • 12
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    • Ph.D. Thesis. Georgia Institute of Technology. Atlanta
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    • (2004) School of Industrial and Systems Engineering
    • Kim, H.1
  • 14
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    • A high-fidelity, web-based simulator for 300mm wafer fabs
    • Man, and Cybernetics
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    • (2001) IEEE International Conference on Systems
    • Kim, H.1    Park, J.2
  • 15
    • 0032097015 scopus 로고    scopus 로고
    • 300 mm wafers: Implications to fab architecture
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.