Using an optimized queueing network model to support wafer fab design

IIE Transactions (Institute of Industrial Engineers)

Volumn 34, Issue 2, 2002, Pages 119-130

  Hopp, Wallace J ^a   Spearman, Mark L ^b   Chayet, Sergio ^c   Donohue, Karen L ^d   Gel, Esma S ^e  

^a Northwestern University   (United States)

^b Factory Physics Inc   (United States)

^c UNIVERSITY OF CHICAGO   (United States)

^d UNIVERSITY OF MINNESOTA   (United States)

^e Arizona State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; COMPUTER SIMULATION; DECISION SUPPORT SYSTEMS; MATHEMATICAL MODELS; OPTIMIZATION; QUEUEING NETWORKS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

CAPACITY PLANNING TOOL; OPTIMIZED QUEUEING NETWORK;

INDUSTRIAL ENGINEERING;

EID: 0036468703     PISSN: 0740817X     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1011987712718     Document Type: Article

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