Trends in 300 mm factory automation

Semiconductor International

Volumn 26, Issue 6, 2003, Pages 60-64

  Hunter, Roy ^a   Humphreys, Chris ^b  

^a TEXAS INSTRUMENTS   (United States)

^b Asyst Technologies Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FACTORY OPERATION SYSTEM (FOS); FRONT-OPENING UNIFIED POD (FOUP); MATERIAL CONTROL SYSTEM (MCS); OVERHEAD HOIST TRANSPORT (OHT);

COMPUTER INTEGRATED MANUFACTURING; COST EFFECTIVENESS; ERGONOMICS; FACTORY AUTOMATION; HAND HELD COMPUTERS; INTEROPERABILITY; MATERIALS HANDLING; MATHEMATICAL MODELS; PROCESS CONTROL; PRODUCT DESIGN; ROBUSTNESS (CONTROL SYSTEMS); STANDARDIZATION;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 2142811512     PISSN: 01633767     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Review

References (7)

1. B. Sohn, D. Pillai and N. Acker, "300 mm Factory Design for Operational Effectiveness," Proc. European IEEE/SEMI Semiconductor Manufacturing Conf., April 2-3, 2000.
2. L. Foster, "300 mm Wafer Factory Automation and the Logistics Infrastructure Challenge," Future Fab, June 29, 2001.
3. C. Harris, "Integration Key for 300 mm Fab Automation," Semiconductor International, June 2001, p. 85.
4. M. Lester, "2003 Top Fabs," Semiconductor International, May 2003, p. 42.
5. K. Hurley, "Pushing the Limits of Factory Automation," Semiconductor Fabtech, July 2000.
6. T. Inoue, "A Comparison of AMHS Delivery-Models in the Fab of the Future," Future Fab, July 2002.
7. P. Heiland, P. Whitcomb, M. Thamm and R. Tillmann, "300 mm Automation: Perfection or Dead End?" Semiconductor International, July 2002, p. 143.